Book Details

• Publisher: S.K. Kataria & Sons

• Author: Dr. R.K. Singh

• Language: English

• Edition: Reprint 2012

• ISBN: 9788188458172

• Pages: 450

• Cover: Paperback

• Dimensions: 9.4 x 6.1 x 0.7 inches

About the Book

This English paperback book by Dr. R.K. Singh is a useful academic resource for students studying VLSI technology, microelectronics, semiconductor fabrication, and electronics engineering. The book covers important topics such as introduction to VLSI technology, film deposition, epitaxy process, diffusion process, ion implantation, lithography, photoresist and etching, MOSFET and MOS fabrication technology, simulation process, IC fabrication steps, and bipolar IC technology. It also includes appendices, examination paper, and an index, making it helpful for classroom learning, self-study, revision, and examination preparation. With its structured coverage of fabrication processes and VLSI fundamentals, this book is suitable for electronics, electrical, communication, semiconductor, engineering, diploma, and technical course students looking for a reliable reference on VLSI and IC technology concepts.